IPG IX-255 Excimer Micromachining Laser
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| Tool Name | IPG IX-255 Excimer Micromachining Laser |
|---|---|
| Instrument Type | Back End |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | IPG |
| Tool Model | IX-255 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | SOP |
Description
The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.
Specifications
- SN 32826
- Laser 193nm
- Pulse Energy up to 10 mJ
- X-Y Positional Accuracy: <3 μm
- Z-theta Accuracy: <10 μm, ±0.02°
- Fixed Optics
- Vision System Resolution 0.12 μm/ pixel
- DXF and CSV File Interface
Applications
- Laser machining of plastics, glass and PDMS.
Resources
SOPs & Troubleshooting
- SOP: SOP