ABM3000HR Mask Aligner

ABM Mask Aligner

Tool Name	ABM 3000HR Mask Aligner
Instrument Type	Lithography
Staff Manager	Eric Johnston
Lab Location	Soft Lithography
Tool Manufacturer	ABM
Tool Model	3000HR
NEMO Designation	{{{NEMO_Designation}}}
Lab Phone	3-9639
SOP Link	[1]

Description

The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.

Applications

• xxx

Resources

SOPs & Troubleshooting

• SOP: [2]
• Video for basic tool use (no audio, 5.52min):[3]
• Video (LayoutEditor - negative resist alignment marks): [4]