Quattrone Nanofabrication Facility:Quattrone Nanofabrication Facility at UPenn
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The Quattrone Nanofabrication Facility (QNF), located at the Krishna P. Singh Center for Nanotechnology at the University of Pennsylvania, is a a 10,000sq.ft. controlled-environment cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet processing, metrology, and device characterization. The facility is managed by full-time technical staff and available for use by researchers at UPenn and other academic, government and industrial institutions. By providing core nanofabrication capabilities, our mission is to enable research and development across a broad spectrum of areas. Our core endeavors are to support teaching, research, service and commercialization at the micro- and nanoscale.