RENA Compass Dual Stack Spin Rinse Dryer
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Tool Name | RENA Compass Dual Stack Spin Rinse Dryer |
---|---|
Instrument Type | Wet Processing |
Staff Manager | Kyle Keenan |
Lab Location | Bay 3 |
Tool Manufacturer | RENA |
Tool Model | Compass |
NEMO Designation | {{{NEMO_Designation}}} |
Lab Phone | XXXXX |
SOP Link | SOP |
Description
RENA Compass Spin Rinse Dryers (SRD) provide automated cleaning, rinsing, and drying of cassettes of 4" or 6" wafers after wet processing.
Applications
- Automatic SRD