RENA Compass Dual Stack Spin Rinse Dryer

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RENA Compass Dual Stack Spin Rinse Dryer
RENA Compass.jpg
Tool Name RENA Compass Dual Stack Spin Rinse Dryer
Instrument Type Wet Processing
Staff Manager Kyle Keenan
Lab Location Bay 3
Tool Manufacturer RENA
Tool Model Compass
NEMO Designation {{{NEMO_Designation}}}
Lab Phone XXXXX
SOP Link SOP

Description

RENA Compass Spin Rinse Dryers (SRD) provide automated cleaning, rinsing, and drying of cassettes of 4" or 6" wafers after wet processing.

Applications
  • Automatic SRD


Resources

SOPs & Troubleshooting