CEE 200X Spinner

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Spinner - SU8/PDMS
MA-03.jpeg
Tool Name Spinner - SU8/PDMS
Instrument Type Lithography
Staff Manager Eric Johnston
Lab Location Soft Lithography
Tool Manufacturer CEE
Tool Model xxx
NEMO Designation {{{NEMO_Designation}}}
Lab Phone 3-9639
SOP Link SOP

Description

Spinner for coating substrates with thicker resists as well as PDMS. Control of ramp rate and speed. Included wafer centering check.

Applications
  • xxx


Resources

SOPs & Troubleshooting
  • SOP: SOP
  • Video for basic tool use (6.47min):Video
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