RTA-01
Tool Name | Rapid Thermal Annealer - 01 |
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Instrument Type | Thermal Processing |
Staff Manager | Lucas Barreto |
Lab Location | Bay 2 |
Tool Manufacturer | AET |
Tool Model | Thermal RX |
NEMO Designation | RTA-01 |
Lab Phone | 215-898-9736 |
SOP Link | SOP |
Description
The Rapid Thermal Annealer-01 anneals the sample up to 1200° C. The processes can be run under atmospheric pressure in Oxygen, Nitrogen, Forming Gas, and Argon environments. The tool can hold 4’’ wafers or smaller chips. Only MOS-compatible materials are allowed. Compound semiconductors and metals are not allowed.