IPG IX280-DXF Green Micromachining Laser

IPG IX280-DXF Green Micromachining Laser

Tool Name	IPG IX280-DXF Green Micromachining Laser
Instrument Type	Back End
Staff Manager	Eric Johnston
Lab Location	Soft Lithography
Tool Manufacturer	IPG
Tool Model	IX280
NEMO Designation	{{{NEMO_Designation}}}
Lab Phone	3-9639
SOP Link	SOP

Description

The IX280-DXF is a highly flexible laser micro-machining system for multipurpose, R&D and production applications. The system combines a Class 1 workstation integrated with a fiber laser and all necessary software.

Specifications

• Model: 115-4-A15834
• Serial Number: 32826
• Lasers at 532 or 1064 nm
• Pulse Energy up to 15 Joules (1064 nm)
• X-Y Positional Accuracy: <3 μm
• Z-theta Accuracy: <10 μm, ±0.02°
• Galvanometer Scanner or Fixed Optics

• Galvo model: IntelliSCAN14
• Galvo serial number: 411365

• Step and Scan Stage/ Galvo Integration
• Vision System Resolution 0.12 μm/ pixel
• DXF and DWG drawing files accepted

Applications

Cutting Applications

• Ceramics, Metals, Polymers and Semiconductor Materials
• Patterning of ITO and other Thin-films

Drilling Applications

• Hole Diameters down to 15 μm

For rectangular through cuts, put the horizontal and vertical cuts on a separate layer and run them separately (as shown in image below). The cuts should be about 100um wide and set up as a fill per the SOP.

Resources

SOPs & Troubleshooting

• QNF SOP
• [LMM-02_Green_Laser_Troubleshooting Troubleshooting]