CEE 200X Spinner
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| Tool Name | Spinner - SU8/PDMS |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | CEE |
| Tool Model | 200X |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | SOP |
Description
Spinner for coating substrates with thicker resists as well as PDMS. Control of ramp rate and speed. Includes wafer centering step.