Difference between revisions of "ABM3000HR Mask Aligner"
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| Iris_Designation = MA-01 | | Iris_Designation = MA-01 | ||
| Lab_Phone = 3-9639 | | Lab_Phone = 3-9639 | ||
| − | | SOP Link = [https://repository.upenn.edu/scn_sop/10/] | + | | SOP Link = [https://repository.upenn.edu/scn_sop/10/ SOP] |
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===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
| − | * SOP: [https://repository.upenn.edu/scn_sop/10/] | + | * SOP: [https://repository.upenn.edu/scn_sop/10/ SOP] |
| − | * Video for basic tool use (no audio, 5.52min):[https://www.youtube.com/watch?v=cRzLljt0VLs] | + | * Video for basic tool use (no audio, 5.52min):[https://www.youtube.com/watch?v=cRzLljt0VLs Basic Video] |
| − | * Video (LayoutEditor - negative resist alignment marks): [https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16] | + | * Video (LayoutEditor - negative resist alignment marks): [https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16 Video] |
Revision as of 13:53, 14 March 2022
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| Tool Name | ABM 3000HR Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | ABM |
| Tool Model | 3000HR |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | SOP |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
- xxx
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video for basic tool use (no audio, 5.52min):Basic Video
- Video (LayoutEditor - negative resist alignment marks): Video