Difference between revisions of "ABM3000HR Mask Aligner"
Jump to navigation
Jump to search
m |
|||
| Line 27: | Line 27: | ||
===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
| − | * [https://repository.upenn.edu/scn_sop/ | + | * [https://repository.upenn.edu/scn_sop/10/] |
Revision as of 13:41, 14 March 2022
 |
|
| Tool Name | ABM 3000HR Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | ABM |
| Tool Model | 3000HR |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | [1] |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
- xxx