Difference between revisions of "KLA Tencor P7 2D profilometer"
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===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
* [https://repository.upenn.edu/scn_sop/12/ QNF SOP] | * [https://repository.upenn.edu/scn_sop/12/ QNF SOP] | ||
| + | * [https://upenn.box.com/s/ir2f5bq3ig84nj8kcj74zh7ci4yyddll P7 Stylus Force Adjustment] | ||
| + | * [https://upenn.box.com/s/znnrjm5ufix3sg7ao4os7n20zwyoe5ik Scan Offset Manual Adjustment] | ||
Revision as of 09:37, 29 April 2022
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| Tool Name | KLA Tencor P7 2D profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | Sam Azadi |
| Lab Location | Bay 2 |
| Tool Manufacturer | KLA |
| Tool Model | P7 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.
Applications
- Film step height measurements
- Photo resist thickness
- Etched trench depth
- Materials characterization for surface roughness and waviness