Difference between revisions of "KLA Tencor P7 2D profilometer"
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== Description == | == Description == | ||
| − | The | + | The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution. |
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| − | The | ||
===== Applications ===== | ===== Applications ===== | ||
| − | * | + | * Film step height measurements |
| − | * | + | * Photo resist thickness |
| − | * | + | * Etched trench depth |
| − | * | + | * Materials characterization for surface roughness and waviness |
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Revision as of 15:41, 29 March 2022
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| Tool Name | KLA Tencor P7 2D profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | Sam Azadi |
| Lab Location | Bay 2 |
| Tool Manufacturer | KLA |
| Tool Model | P7 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.
Applications
- Film step height measurements
- Photo resist thickness
- Etched trench depth
- Materials characterization for surface roughness and waviness