|
|
| Line 100: |
Line 100: |
| | | K-PRO 3 || + || Plating, Etching|| SPR 220-3, SPR 220-4.5|| [https://upenn.box.com/s/v0hwe0p0u3la1oodz3g45qjw0yl54z7f Datasheet] | | | K-PRO 3 || + || Plating, Etching|| SPR 220-3, SPR 220-4.5|| [https://upenn.box.com/s/v0hwe0p0u3la1oodz3g45qjw0yl54z7f Datasheet] |
| | |- | | |- |
| − | | AZ 12XT-20PL-15 || + || Thick Resist, Plating, Packaging || SPR 220-7, AZ P4620 || [https://upenn.box.com/s/dj5l9rrsg0k8g8opdegrylhkgypev9w9 Datasheet] | + | | AZ 12XT-20PL-15 || + || CAR (i-line), Plating, Packaging, Deep Etch || SPR 220-7, AZ P4620 || [https://upenn.box.com/s/dj5l9rrsg0k8g8opdegrylhkgypev9w9 Datasheet] |
| | |- | | |- |
| | | AZ P4620|| + || Thick Resist, Plating, Packaging || SPR 220-7, AZ 12XT-20PL-15 || [https://upenn.box.com/s/0r8meepoyq0b1jux7ubudcpt70clau48 Datasheet] | | | AZ P4620|| + || Thick Resist, Plating, Packaging || SPR 220-7, AZ 12XT-20PL-15 || [https://upenn.box.com/s/0r8meepoyq0b1jux7ubudcpt70clau48 Datasheet] |
Revision as of 11:06, 11 May 2023
The QNF provides a variety of standard resists to meet demands for most applications. Some specialty resists are also sold through the QNF Stockroom. A summary of stocked resists along with some processing information can be found in the table below. Other similar options that may be available in QNF are also listed.
QNF Supplied Standard Photoresists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| S1805 |
+ |
General |
KL5305 |
Datasheet
|
| S1813 |
+ |
General |
KL5315 |
Datasheet
|
| S1818 |
+ |
General |
|
Datasheet
|
| SPR 220-3 |
+ |
Etch |
KPRO-3, KL6003, AZ3330F |
Datasheet
|
| SPR 220-4.5 |
+ |
Etch |
KPRO-3, KL6003, AZ3330F |
Datasheet
|
| SPR 220-7 |
+ |
Etch |
AZ 12XT, AZ P4620 |
Datasheet
|
| AZ 3330F |
+ |
General, Metal RIE, Plating |
SPR 220-3, SPR 220-4.5, K-PRO 3, KL6003 |
Datasheet
|
| NR7-3000P |
- |
Etch, General |
|
Datasheet
|
| APOL-LO 3202 |
- |
Liftoff |
|
Datasheet
|
| IP-Dip |
- |
Nanoscribe |
|
|
| HARE SQ 2 |
- |
Epoxy |
SU-8 2005 |
Datasheet
|
| HARE SQ 50 |
- |
Epoxy |
SU-8 2050 |
Datasheet
|
Stockroom Photoresists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| SU-8 2005 |
- |
Epoxy |
HARE SQ 2 |
Datasheet
|
| SU-8 2050 |
- |
Epoxy |
HARE SQ 50 |
Datasheet
|
| SU-8 2100 |
- |
Epoxy |
HARE SQ 50 |
Datasheet
|
| SU-8 3050 |
- |
Epoxy |
HARE SQ 50 |
Datasheet
|
Standard e-beam Resists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| 495 PMMA A8 |
+ |
Lower Resolution |
|
Datasheet
|
| 495 PMMA A4 |
+ |
Lower Resolution |
|
Datasheet
|
| 495 PMMA A2 |
+ |
Lower Resolution |
|
Datasheet
|
| 950 PMMA A4 |
+ |
High Resolution |
|
Datasheet
|
| 950 PMMA A2 |
+ |
High Resolution |
1000 HARP 0.1 |
Datasheet
|
| 1000 HARP 1.3 |
+ |
High Resolution |
|
Datasheet
|
| 1000 HARP 0.1 |
+ |
High Resolution |
950 PMMA A2 |
Datasheet
|
Stockroom e-beam Resists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| ZEP 520A |
+ |
Thicker formulation |
|
Datasheet
|
| ZEP 520A-7 |
+ |
Thinner formulation |
|
Datasheet
|
| H-SiQ 6% |
- |
HSQ Equivalent |
|
Datasheet
|
Other Resists
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| LOR 3A |
N/A |
Liftoff, Non-imaging |
|
Datasheet
|
| PMGI SF 5S |
N/A |
Liftoff, Non-imaging |
|
Datasheet
|
| PMGI SF 2S |
N/A |
Liftoff, Non-imaging |
|
Datasheet
|
| NXR-1025 |
N/A |
Stockroom, Nanoimprint resist |
|
Datasheet
|
Miscellaneous
These may be available but are not guaranteed to be stocked
| Resist |
Tone |
Notes |
Alternatives |
Datasheet
|
| KL5305 |
+ |
General |
S1805 |
Datasheet
|
| KL5315 |
+ |
General |
S1813 |
Datasheet
|
| KL6003 |
+ |
|
SPR 220-3, SPR 220-4.5 |
Datasheet
|
| K-PRO 3 |
+ |
Plating, Etching |
SPR 220-3, SPR 220-4.5 |
Datasheet
|
| AZ 12XT-20PL-15 |
+ |
CAR (i-line), Plating, Packaging, Deep Etch |
SPR 220-7, AZ P4620 |
Datasheet
|
| AZ P4620 |
+ |
Thick Resist, Plating, Packaging |
SPR 220-7, AZ 12XT-20PL-15 |
Datasheet
|
| ma-N 2403 |
- |
e-beam/DUV Mix and Match |
|
Datasheet
|