Difference between revisions of "Resists at QNF"

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| K-PRO 3 || + || Plating, Etching|| SPR 220-3, SPR 220-4.5|| [https://upenn.box.com/s/v0hwe0p0u3la1oodz3g45qjw0yl54z7f Datasheet]
 
| K-PRO 3 || + || Plating, Etching|| SPR 220-3, SPR 220-4.5|| [https://upenn.box.com/s/v0hwe0p0u3la1oodz3g45qjw0yl54z7f Datasheet]
 
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| AZ 12XT-20PL-15 || + || Thick Resist, Plating, Packaging || SPR 220-7, AZ P4620 || [https://upenn.box.com/s/dj5l9rrsg0k8g8opdegrylhkgypev9w9 Datasheet]
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| AZ 12XT-20PL-15 || + || CAR (i-line), Plating, Packaging, Deep Etch || SPR 220-7, AZ P4620 || [https://upenn.box.com/s/dj5l9rrsg0k8g8opdegrylhkgypev9w9 Datasheet]
 
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| AZ P4620|| + || Thick Resist, Plating, Packaging || SPR 220-7, AZ 12XT-20PL-15 || [https://upenn.box.com/s/0r8meepoyq0b1jux7ubudcpt70clau48 Datasheet]
 
| AZ P4620|| + || Thick Resist, Plating, Packaging || SPR 220-7, AZ 12XT-20PL-15 || [https://upenn.box.com/s/0r8meepoyq0b1jux7ubudcpt70clau48 Datasheet]

Revision as of 12:06, 11 May 2023

The QNF provides a variety of standard resists to meet demands for most applications. Some specialty resists are also sold through the QNF Stockroom. A summary of stocked resists along with some processing information can be found in the table below. Other similar options that may be available in QNF are also listed.

QNF Supplied Standard Photoresists

Resist Tone Notes Alternatives Datasheet
S1805 + General KL5305 Datasheet
S1813 + General KL5315 Datasheet
S1818 + General Datasheet
SPR 220-3 + Etch KPRO-3, KL6003, AZ3330F Datasheet
SPR 220-4.5 + Etch KPRO-3, KL6003, AZ3330F Datasheet
SPR 220-7 + Etch AZ 12XT, AZ P4620 Datasheet
AZ 3330F + General, Metal RIE, Plating SPR 220-3, SPR 220-4.5, K-PRO 3, KL6003 Datasheet
NR7-3000P - Etch, General Datasheet
APOL-LO 3202 - Liftoff Datasheet
IP-Dip - Nanoscribe
HARE SQ 2 - Epoxy SU-8 2005 Datasheet
HARE SQ 50 - Epoxy SU-8 2050 Datasheet

Stockroom Photoresists

Resist Tone Notes Alternatives Datasheet
SU-8 2005 - Epoxy HARE SQ 2 Datasheet
SU-8 2050 - Epoxy HARE SQ 50 Datasheet
SU-8 2100 - Epoxy HARE SQ 50 Datasheet
SU-8 3050 - Epoxy HARE SQ 50 Datasheet

Standard e-beam Resists

Resist Tone Notes Alternatives Datasheet
495 PMMA A8 + Lower Resolution Datasheet
495 PMMA A4 + Lower Resolution Datasheet
495 PMMA A2 + Lower Resolution Datasheet
950 PMMA A4 + High Resolution Datasheet
950 PMMA A2 + High Resolution 1000 HARP 0.1 Datasheet
1000 HARP 1.3 + High Resolution Datasheet
1000 HARP 0.1 + High Resolution 950 PMMA A2 Datasheet

Stockroom e-beam Resists

Resist Tone Notes Alternatives Datasheet
ZEP 520A + Thicker formulation Datasheet
ZEP 520A-7 + Thinner formulation Datasheet
H-SiQ 6% - HSQ Equivalent Datasheet

Other Resists

Resist Tone Notes Alternatives Datasheet
LOR 3A N/A Liftoff, Non-imaging Datasheet
PMGI SF 5S N/A Liftoff, Non-imaging Datasheet
PMGI SF 2S N/A Liftoff, Non-imaging Datasheet
NXR-1025 N/A Stockroom, Nanoimprint resist Datasheet

Miscellaneous

These may be available but are not guaranteed to be stocked

Resist Tone Notes Alternatives Datasheet
KL5305 + General S1805 Datasheet
KL5315 + General S1813 Datasheet
KL6003 + SPR 220-3, SPR 220-4.5 Datasheet
K-PRO 3 + Plating, Etching SPR 220-3, SPR 220-4.5 Datasheet
AZ 12XT-20PL-15 + CAR (i-line), Plating, Packaging, Deep Etch SPR 220-7, AZ P4620 Datasheet
AZ P4620 + Thick Resist, Plating, Packaging SPR 220-7, AZ 12XT-20PL-15 Datasheet
ma-N 2403 - e-beam/DUV Mix and Match Datasheet