Difference between revisions of "Resists at QNF"
Jump to navigation
Jump to search
| Line 60: | Line 60: | ||
|- | |- | ||
| 1000 HARP 0.1|| + || High Resolution|| 950 PMMA A2 || [https://upenn.box.com/s/re1sz5cil83m99yv3ug2p9p8ghk3a3vm Datasheet] | | 1000 HARP 0.1|| + || High Resolution|| 950 PMMA A2 || [https://upenn.box.com/s/re1sz5cil83m99yv3ug2p9p8ghk3a3vm Datasheet] | ||
| + | |} | ||
| + | |||
| + | === Stockroom e-beam Resists === | ||
| + | {| class="wikitable sortable" | ||
| + | ! Resist !! Tone !! Notes !! Alternatives !! Datasheet | ||
| + | |- | ||
| + | | ZEP 520A|| + || Thicker formulation || || [https://upenn.box.com/s/7ek7ccxq3c8xsp8jhe2lhdoi1e0keamt Datasheet] | ||
| + | |- | ||
| + | | ZEP 520A-7|| + || Thinner formulation || || [https://upenn.box.com/s/7ek7ccxq3c8xsp8jhe2lhdoi1e0keamt Datasheet] | ||
| + | |- | ||
| + | | H-SiQ 6%|| - || HSQ Equivalent || || [https://upenn.box.com/s/bv53alommdr2en6s6byrlm4psxdjohzp Datasheet] | ||
|} | |} | ||
Revision as of 10:00, 11 May 2023
The QNF provides a variety of standard resists to meet demands for most applications. Some specialty resists are also sold through the QNF Stockroom. A summary of stocked resists along with some processing information can be found in the table below. Other similar options that may be available in QNF are also listed.
QNF Supplied Standard Photoresists
| Resist | Tone | Notes | Alternatives | Datasheet |
|---|---|---|---|---|
| S1805 | + | General | KL5305 | Datasheet |
| S1813 | + | General | KL5315 | Datasheet |
| S1818 | + | General | Datasheet | |
| SPR 220-3 | + | Etch | KPRO-3, KL6003, AZ3330F | Datasheet |
| SPR 220-4.5 | + | Etch | KPRO-3, KL6003, AZ3330F | Datasheet |
| SPR 220-7 | + | Etch | AZ 12XT, AZ P4620 | Datasheet |
| AZ 3330F | + | General, Metal RIE, Plating | SPR 220-3, SPR 220-4.5, K-PRO 3, KL6003 | Datasheet |
| NR7-3000P | - | Etch, General | Datasheet | |
| APOL-LO 3202 | - | Liftoff | Datasheet | |
| IP-Dip | - | Nanoscribe | ||
| HARE SQ 2 | - | Epoxy | SU-8 2005 | Datasheet |
| HARE SQ 50 | - | Epoxy | SU-8 2050 | Datasheet |
Stockroom Photoresists
| Resist | Tone | Notes | Alternatives | Datasheet |
|---|---|---|---|---|
| SU-8 2005 | - | Epoxy | HARE SQ 2 | Datasheet |
| SU-8 2050 | - | Epoxy | HARE SQ 50 | Datasheet |
| SU-8 2100 | - | Epoxy | HARE SQ 50 | Datasheet |
| SU-8 3050 | - | Epoxy | HARE SQ 50 | Datasheet |
Standard e-beam Resists
| Resist | Tone | Notes | Alternatives | Datasheet |
|---|---|---|---|---|
| 495 PMMA A8 | + | Lower Resolution | Datasheet | |
| 495 PMMA A4 | + | Lower Resolution | Datasheet | |
| 495 PMMA A2 | + | Lower Resolution | Datasheet | |
| 950 PMMA A4 | + | High Resolution | Datasheet | |
| 950 PMMA A2 | + | High Resolution | 1000 HARP 0.1 | Datasheet |
| 1000 HARP 1.3 | + | High Resolution | Datasheet | |
| 1000 HARP 0.1 | + | High Resolution | 950 PMMA A2 | Datasheet |
Stockroom e-beam Resists
| Resist | Tone | Notes | Alternatives | Datasheet |
|---|---|---|---|---|
| ZEP 520A | + | Thicker formulation | Datasheet | |
| ZEP 520A-7 | + | Thinner formulation | Datasheet | |
| H-SiQ 6% | - | HSQ Equivalent | Datasheet |