Difference between revisions of "RENA Compass Dual Stack Spin Rinse Dryer"

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Revision as of 11:24, 24 May 2023


RENA Compass Dual Stack Spin Rinse Dryer
RENA Compass.jpg
Tool Name RENA Compass Dual Stack Spin Rinse Dryer
Instrument Type Wet Processing
Staff Manager Kyle Keenan
Lab Location Bay 3
Tool Manufacturer RENA
Tool Model Compass
NEMO Designation {{{NEMO_Designation}}}
Lab Phone XXXXX
SOP Link SOP

Description

RENA Compass Spin Rinse Dryers (SRD) provide automated cleaning, rinsing, and drying of cassettes of 4" or 6" wafers after wet processing.

Applications
  • Automatic SRD


Resources

SOPs & Troubleshooting