Heidelberg DWL 66+ Laser Writer

Heidelberg DWL 66+ Laser Writer

Tool Name	Heidelberg DWL 66+ Laser Writer
Instrument Type	Lithography
Staff Manager	David Jones
Lab Location	Bay 2
Tool Manufacturer	Heidelberg
Tool Model	DWL 66+
NEMO Designation	{{{NEMO_Designation}}}
Lab Phone	8-9799
SOP Link	SOP

Description

The fully automated DWL 66+ laser writing system is located inside an environment chamber for stable environment of the system with controlled laminar airflow and temperature stability. The chamber is situated on a granite base with air cushions for vibration isolation. The optical system includes highly reflective mirrors and acousto-optic modulators for real-time beam correction.

Lens & Resolution

• 2 mm lens (optical autofocus): 600 nm
• 10 mm lens (pneumatic autofocus): 2 µm
• 40 mm lens (pneumatic autofocus): 10 µm

Applications

• Patterning of photomasks
• Direct laser writing of patterns

Processes

The following exposure parameters may be used to expose photomasks.

Resist	Write Head	Filter(s)	Laser Power (mW)	Intensity	Focus	Focus mode
AZ1500	10mm	50%	50	70%	30	Pneumatic
IP3500	10mm	None	50	90%	30	Pneumatic
IP3500	2mm	12.5%	50	30%	30	Pneumatic

The following exposure parameters may be used to direct write into S1800 resist (soft baked at 115C for 1 minute) with the 10mm write head. For the optimum focus, please refer to the "AZ1500.txt" or "IP3500.txt" files for the optimum value to use.

Resist thk (µm)	Laser power (mW)	Intensity	Filter
0.50	28.8	100%	50%
0.55	29.5	100%	50%
0.60	30.3	100%	50%
0.65	31.3	100%	50%
0.70	32.3	100%	50%
0.75	33.4	100%	50%
0.80	34.7	100%	50%
0.85	36.0	100%	50%
0.90	37.5	100%	50%
0.95	39.1	100%	50%
1.00	40.8	100%	50%
1.05	42.6	100%	50%
1.10	44.5	100%	50%
1.15	46.5	100%	50%
1.20	48.7	100%	50%
1.25	50.9	100%	50%
1.30	53.3	100%	50%
1.35	55.8	100%	50%
1.40	58.3	100%	50%
1.45	61.0	100%	50%
1.50	63.8	100%	50%

The following exposure parameters may be used to direct write into S1800 resist (soft baked at 115C for 1 minute) with the 2mm write head. For the optimum focus, please refer to the "AZ1500.txt" or "IP3500.txt" files for the optimum value to use.

Resist Thk (µm)	Laser Power (mW)	Intensity	Filter
0.5	24.1	70%	12.5% & 25%
0.55	26.4	70%	12.5% & 25%
0.6	28.7	70%	12.5% & 25%
0.65	31.0	70%	12.5% & 25%
0.7	33.2	70%	12.5% & 25%
0.75	35.5	70%	12.5% & 25%
0.8	37.7	70%	12.5% & 25%
0.85	40.0	70%	12.5% & 25%
0.9	42.2	70%	12.5% & 25%
0.95	44.4	70%	12.5% & 25%
1	46.6	70%	12.5% & 25%
1.05	48.8	70%	12.5% & 25%
1.1	51.0	70%	12.5% & 25%
1.15	53.1	70%	12.5% & 25%
1.2	55.3	70%	12.5% & 25%
1.25	57.4	70%	12.5% & 25%
1.3	59.6	70%	12.5% & 25%
1.35	61.7	70%	12.5% & 25%
1.4	63.8	70%	12.5% & 25%
1.45	65.9	70%	12.5% & 25%
1.5	68.0	70%	12.5% & 25%

Resources

SOPs & Troubleshooting

• QNF SOP