Difference between revisions of "ABM Mask Aligner"
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{| class="wikitable" style="vertical-align:bottom;" | {| class="wikitable" style="vertical-align:bottom;" | ||
|- | |- | ||
| + | ! | ||
| + | ! mW/cm^2 | ||
| + | ! % of output | ||
| + | |- | ||
| NO MASK | | NO MASK | ||
| − | | | + | | ~10 |
| − | | 100% | + | | 100% |
|- | |- | ||
| GLASS MASK | | GLASS MASK | ||
| − | | | + | | ~9 |
| 87.5% | | 87.5% | ||
|- | |- | ||
| GLASS + FILM MASK | | GLASS + FILM MASK | ||
| − | | | + | | ~7 |
| 68.5% | | 68.5% | ||
|- | |- | ||
| GLASS + LP FILTER | | GLASS + LP FILTER | ||
| − | | | + | | ~5 |
| − | | 47 | + | | 47% |
|- | |- | ||
| GLASS + FILM + LP FILTER | | GLASS + FILM + LP FILTER | ||
| − | | | + | | ~4 |
| − | | 37 | + | | 37% |
|} | |} | ||
Latest revision as of 11:52, 29 April 2025
| Tool Name | ABM Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 6 |
| Tool Manufacturer | ABM |
| Tool Model | |
| NEMO Designation | MA-03 |
| Lab Phone | xxxxx |
| SOP Link | SOP |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
Tool is used primarily for SU8 exposure. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.
Exposure time = dose (mJ/cm^2) / intensity (mW/cm^2) Dose can be determined from the resist data sheet. See table below for intensities.
To obtain vertical sidewalls with a Cr glass mask, use the long pass filter (PL-360-LP) which eliminates UV emission below 350nm. Do not use with film masks. Inherent defects in film masks will be accentuated, resulting in worse results.
| mW/cm^2 | % of output | |
|---|---|---|
| NO MASK | ~10 | 100% |
| GLASS MASK | ~9 | 87.5% |
| GLASS + FILM MASK | ~7 | 68.5% |
| GLASS + LP FILTER | ~5 | 47% |
| GLASS + FILM + LP FILTER | ~4 | 37% |
More information about Soft Lithography processing can be found under Process Resources
Resources
MA-01 to MA-03 Calculator
SOPs & Troubleshooting
- SOP
- Video - Standard procedure for previous model *good overview, note slight differences*
- Video - Alignment Marks