Difference between revisions of "ABM Mask Aligner"

**ABM Mask Aligner**
Tool Name	ABM Mask Aligner
Instrument Type	Lithography
Staff Manager	Ana Cohen
Lab Location	Bay 6
Tool Manufacturer	ABM
Tool Model
NEMO Designation	MA-03
Lab Phone	xxxxx
SOP Link	SOP

Latest revision as of 11:52, 29 April 2025

Description

The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.

Applications

Tool is used primarily for SU8 exposure. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.

Exposure time = dose (mJ/cm^2) / intensity (mW/cm^2) Dose can be determined from the resist data sheet. See table below for intensities.

To obtain vertical sidewalls with a Cr glass mask, use the long pass filter (PL-360-LP) which eliminates UV emission below 350nm. Do not use with film masks. Inherent defects in film masks will be accentuated, resulting in worse results.

	mW/cm^2	% of output
NO MASK	~10	100%
GLASS MASK	~9	87.5%
GLASS + FILM MASK	~7	68.5%
GLASS + LP FILTER	~5	47%
GLASS + FILM + LP FILTER	~4	37%

More information about Soft Lithography processing can be found under Process Resources

Resources

MA-01 to MA-03 Calculator

SOPs & Troubleshooting

SOP
Video - Standard procedure for previous model *good overview, note slight differences*
Video - Alignment Marks

@@ Line 13: / Line 13: @@
 | NEMO_Designation = MA-03
 | Lab_Phone = xxxxx
-| SOP Link =
+| SOP Link =  [https://nemo.nano.upenn.edu/media/tool_documents/ma-03-abm-mask-aligner/MA-03_SOP_v01.pdf  SOP]
 }}
@@ Line 30: / Line 30: @@
 {| class="wikitable" style="vertical-align:bottom;"
 |-
+!
+! mW/cm^2
+! % of output
+|-
 | NO MASK
-| 20 mW/cm^2
+| ~10
-| 100% of output
+| 100%
 |-
 | GLASS MASK
-| 17.5 mW/cm^2
+| ~9
 | 87.5%
 |-
 | GLASS + FILM MASK
-| 13.7 mW/cm^2
+| ~7
 | 68.5%
 |-
 | GLASS + LP FILTER
-| 9.4 mW/cm^2
+| ~5
-| 47.0%
+| 47%
 |-
 | GLASS + FILM + LP FILTER
-| 7.4 mW/cm^2
+| ~4
-| 37.0%
+| 37%
 |}
@@ Line 59: / Line 63: @@
 ===== SOPs & Troubleshooting =====
-* SOP: [  SOP]
+* [https://nemo.nano.upenn.edu/media/tool_documents/ma-03-abm-mask-aligner/MA-03_SOP_v01.pdf  SOP]
-* Video for basic tool use (no audio, 5.52min):[https://www.youtube.com/watch?v=cRzLljt0VLs Basic Video]
+* [https://www.youtube.com/watch?v=cRzLljt0VLs Video - Standard procedure for previous model] *good overview, note slight differences*
-* Video (LayoutEditor - negative resist alignment marks): [https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16 Video]
+* [https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16 Video - Alignment Marks ]