Difference between revisions of "ABM Mask Aligner"
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| − | | SOP Link = | + | | SOP Link = [https://nemo.nano.upenn.edu/media/tool_documents/ma-03-abm-mask-aligner/MA-03_SOP_v01.pdf SOP] |
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===== SOPs & Troubleshooting ===== | ===== SOPs & Troubleshooting ===== | ||
| − | * | + | * [https://nemo.nano.upenn.edu/media/tool_documents/ma-03-abm-mask-aligner/MA-03_SOP_v01.pdf SOP] |
| − | * | + | * [https://www.youtube.com/watch?v=cRzLljt0VLs Video - Standard procedure for previous model] *good overview, note slight differences* |
| − | * | + | * [https://www.youtube.com/watch?v=Q1DvZBQgKhI&list=PLiihbHV9HgpX_9m5Khz2wn-XaxM5-yErU&index=16 Video -(LayoutEditor - negative resist alignment marks)] |
Revision as of 16:46, 28 April 2025
| Tool Name | ABM Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Ana Cohen |
| Lab Location | Bay 6 |
| Tool Manufacturer | ABM |
| Tool Model | |
| NEMO Designation | MA-03 |
| Lab Phone | xxxxx |
| SOP Link | SOP |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
Tool is used primarily for SU8 exposure. It can also be used for aligning PDMS components for PDMS-to-PDMS bonding.
Exposure time = dose (mJ/cm^2) / intensity (mW/cm^2) Dose can be determined from the resist data sheet. See table below for intensities.
To obtain vertical sidewalls with a Cr glass mask, use the long pass filter (PL-360-LP) which eliminates UV emission below 350nm. Do not use with film masks. Inherent defects in film masks will be accentuated, resulting in worse results.
| NO MASK | 20 mW/cm^2 | 100% of output |
| GLASS MASK | 17.5 mW/cm^2 | 87.5% |
| GLASS + FILM MASK | 13.7 mW/cm^2 | 68.5% |
| GLASS + LP FILTER | 9.4 mW/cm^2 | 47.0% |
| GLASS + FILM + LP FILTER | 7.4 mW/cm^2 | 37.0% |
More information about Soft Lithography processing can be found under Process Resources
Resources
MA-01 to MA-03 Calculator
SOPs & Troubleshooting
- SOP
- Video - Standard procedure for previous model *good overview, note slight differences*
- Video -(LayoutEditor - negative resist alignment marks)