Difference between revisions of "RTA-01"
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| name = AET Thermal RX | | name = AET Thermal RX | ||
| Tool_Name = Rapid Thermal Annealer - 01 | | Tool_Name = Rapid Thermal Annealer - 01 | ||
− | | image = [[Image: | + | | image = [[Image:RTA01.jpg|300px]] |
| imagecaption = | | imagecaption = | ||
| Instrument_Type = Deposition | | Instrument_Type = Deposition |
Revision as of 13:19, 9 September 2024
Tool Name | Rapid Thermal Annealer - 01 |
---|---|
Instrument Type | Deposition |
Staff Manager | Lucas Barreto |
Lab Location | Bay 2 |
Tool Manufacturer | AET |
Tool Model | Thermal RX |
NEMO Designation | RTA-01 |
Lab Phone | 215-898-9736 |
SOP Link | SOP |
Description
The Rapid Thermal Annealer-01 anneals the sample up to 1200° C. The processes can be run under atmospheric pressure in Oxygen, Nitrogen, Forming Gas, and Argon environments. The tool can hold 4’’ wafers or smaller chips. Only MOS-compatible materials are allowed. Compound semiconductors and metals are not allowed.