IntlVac NanoQuest 1 IBE
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| Tool Name | IntlVac IBE |
|---|---|
| Instrument Type | Etch |
| Staff Manager | Sam Azadi |
| Lab Location | Bay 2 |
| Tool Manufacturer | IntlVac |
| Tool Model | Nanoquest 1 |
| NEMO Designation | DE-01 |
| Lab Phone | 215-898-9748 |
| SOP Link | SOP |
Description
Nanoquest 1 is an ion miller connected to Ar gas and capable of etch small mm-scale samples up to full 4" wafers. The tool is equipped with a secondary ion mass spectroscopy (SIMS) unit and is capable of etch with manual endpoint detection. The stage has a tilt motor that allows for etch angles between 0 (directly facing the beam) and 90 degrees (parallel to the beam).
The tool in QNF is connected to Ar gas and can etch samples up to 4" wafer.
Applications
- Ion milling
Resources
manual loading/unloading operation video