Heidelberg DWL 66+ Laser Writer

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Heidelberg DWL 66+ Laser Writer
LW-01.jpeg
Tool Name Heidelberg DWL 66+ Laser Writer
Instrument Type Lithography
Staff Manager Ana Cohen
Lab Location Bay 2
Tool Manufacturer Heidelberg
Tool Model DWL 66+
NEMO Designation LW-01
Lab Phone 8-9799
SOP Link SOP

Description

The fully automated DWL 66+ laser writing system is located inside an environment chamber for stable environment of the system with controlled laminar airflow and temperature stability. The chamber is situated on a granite base with air cushions for vibration isolation. The optical system includes highly reflective mirrors and acousto-optic modulators for real-time beam correction. The laser is 405nm wavelength (h-line).

Lens & Resolution

  • 2 mm lens (optical autofocus): 600 nm
  • 10 mm lens (pneumatic autofocus): 2 µm
  • 40 mm lens (pneumatic autofocus): 10 µm
Applications
Allowed Materials
  • Mask Plates -- available in the QNF Stockroom pre-coated with AZ1500 and IP3500
  • Resists -- must be compatible with h-line exposure

Processes

The following exposure parameters may be used to expose photomasks. (Updated Feb 15, 2024)

Resist Write Head Filter(s) Laser Power (mW) Intensity Focus # of passes Focus mode
AZ1500 10mm 25% 60 70% +20 1 Pneumatic
IP3500 10mm NONE 60 70% +20 1 Pneumatic
IP3500 2mm 25% & 12.5% 60 50% 0 1 Pneumatic


The following exposure parameters may be used to direct write into S18xx resist on silicon (soft baked at 115C for 60s, development in TMAH 0.26N for 60s). For the optimum focus, please refer to the "AZ1500.txt" or "IP3500.txt" files for the optimum value to use. [May not be up-to-date. It is always a good idea to check your resist thickness and run a dose test to confirm optimal parameters.]

Resist Spin Speed (RPM) Write Head Filter(s) Laser Power (mW) Intensity # passes Focus mode
S1805 3000 10mm 12.5% 105 70% 1 pneumatic
S1805 3000 2mm 1% & 50% 105 100% 1 pneumatic
KL5315 5000 10mm 50% 105 40% 1 pneumatic
KL5315 5000 2mm 1% 75 100% 1 pneumatic
S1818 3000 10mm NONE 65 70% 1 pneumatic
S1818 3000 2mm 12.5% & 25% 60 60% 1 pneumatic


 LW-01 S1818Lines 25um Feb2024.png LW-01 S1818Lines 5um Feb2024.png
 S1818 at 3000rpm (2.2um thickness) with 10mm writehead [Feb 2024]
 65mW, NO Filter, 70% intensity, + 20 focus
 5um, 10um, 25um, and 50um line widths after 60s TMAH 0.26N development

Resources

SOPs & Troubleshooting