View source for RENA Compass Dual Stack Spin Rinse Dryer

[[Category:Wet Processing]]

{{EquipmentInfo
| name = RENA Compass Dual Stack Spin Rinse Dryer
| Tool_Name = RENA Compass Dual Stack Spin Rinse Dryer
| image = [[Image:MET-08.jpeg|300px]]
| imagecaption = 
| Instrument_Type = Wet Processing
| Staff_Manager = Kyle Keenan
| Lab_Location = Bay 3
| Tool_Manufacturer = RENA
| Tool_Model = Compass
| Iris_Designation = SRD-01
| Lab_Phone = XXXXX
| SOP Link = [https://repository.upenn.edu/cgi/viewcontent.cgi?article=1026&context=scn_sop SOP]
}}

== Description ==
RENA Compass Spin Rinse Dryers (SRD) provide automated cleaning, rinsing, and drying of cassettes of 4" or 6" wafers after wet processing. 

===== Applications =====
* Automatic SRD



== Resources ==

===== SOPs & Troubleshooting =====
* [https://repository.upenn.edu/cgi/viewcontent.cgi?article=1026&context=scn_sop SOP]