Difference between revisions of "Resists at QNF"
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| SU-8 3050|| - || Epoxy || HARE SQ 50 || [https://upenn.box.com/s/f9oi75p3p84rdtpqq5unp0j1c3mqxjrd Datasheet] | | SU-8 3050|| - || Epoxy || HARE SQ 50 || [https://upenn.box.com/s/f9oi75p3p84rdtpqq5unp0j1c3mqxjrd Datasheet] | ||
| + | |} | ||
| + | |||
| + | === Standard e-beam Resists === | ||
| + | {| class="wikitable sortable" | ||
| + | ! Resist !! Tone !! Notes !! Alternatives !! Datasheet | ||
| + | |- | ||
| + | | 495 PMMA A8|| + || Lower Resolution|| || [https://upenn.box.com/s/ff9s9dhl52tqagc0vbtflwf64odcwtw7 Datasheet] | ||
| + | |- | ||
| + | | 495 PMMA A4|| + || Lower Resolution|| || [https://upenn.box.com/s/ff9s9dhl52tqagc0vbtflwf64odcwtw7 Datasheet] | ||
| + | |- | ||
| + | | 495 PMMA A2|| + || Lower Resolution|| || [https://upenn.box.com/s/ff9s9dhl52tqagc0vbtflwf64odcwtw7 Datasheet] | ||
| + | |- | ||
| + | | 950 PMMA A4|| + || High Resolution|| || [https://upenn.box.com/s/ff9s9dhl52tqagc0vbtflwf64odcwtw7 Datasheet] | ||
| + | |- | ||
| + | | 950 PMMA A2|| + || High Resolution|| 1000 HARP 0.1 || [https://upenn.box.com/s/ff9s9dhl52tqagc0vbtflwf64odcwtw7 Datasheet] | ||
| + | |- | ||
| + | | 1000 HARP 1.3|| + || High Resolution|| || [https://upenn.box.com/s/re1sz5cil83m99yv3ug2p9p8ghk3a3vm Datasheet] | ||
| + | |- | ||
| + | | 1000 HARP 0.1|| + || High Resolution|| 950 PMMA A2 || [https://upenn.box.com/s/re1sz5cil83m99yv3ug2p9p8ghk3a3vm Datasheet] | ||
|} | |} | ||
Revision as of 09:59, 11 May 2023
The QNF provides a variety of standard resists to meet demands for most applications. Some specialty resists are also sold through the QNF Stockroom. A summary of stocked resists along with some processing information can be found in the table below. Other similar options that may be available in QNF are also listed.
QNF Supplied Standard Photoresists
| Resist | Tone | Notes | Alternatives | Datasheet |
|---|---|---|---|---|
| S1805 | + | General | KL5305 | Datasheet |
| S1813 | + | General | KL5315 | Datasheet |
| S1818 | + | General | Datasheet | |
| SPR 220-3 | + | Etch | KPRO-3, KL6003, AZ3330F | Datasheet |
| SPR 220-4.5 | + | Etch | KPRO-3, KL6003, AZ3330F | Datasheet |
| SPR 220-7 | + | Etch | AZ 12XT, AZ P4620 | Datasheet |
| AZ 3330F | + | General, Metal RIE, Plating | SPR 220-3, SPR 220-4.5, K-PRO 3, KL6003 | Datasheet |
| NR7-3000P | - | Etch, General | Datasheet | |
| APOL-LO 3202 | - | Liftoff | Datasheet | |
| IP-Dip | - | Nanoscribe | ||
| HARE SQ 2 | - | Epoxy | SU-8 2005 | Datasheet |
| HARE SQ 50 | - | Epoxy | SU-8 2050 | Datasheet |
Stockroom Photoresists
| Resist | Tone | Notes | Alternatives | Datasheet |
|---|---|---|---|---|
| SU-8 2005 | - | Epoxy | HARE SQ 2 | Datasheet |
| SU-8 2050 | - | Epoxy | HARE SQ 50 | Datasheet |
| SU-8 2100 | - | Epoxy | HARE SQ 50 | Datasheet |
| SU-8 3050 | - | Epoxy | HARE SQ 50 | Datasheet |
Standard e-beam Resists
| Resist | Tone | Notes | Alternatives | Datasheet |
|---|---|---|---|---|
| 495 PMMA A8 | + | Lower Resolution | Datasheet | |
| 495 PMMA A4 | + | Lower Resolution | Datasheet | |
| 495 PMMA A2 | + | Lower Resolution | Datasheet | |
| 950 PMMA A4 | + | High Resolution | Datasheet | |
| 950 PMMA A2 | + | High Resolution | 1000 HARP 0.1 | Datasheet |
| 1000 HARP 1.3 | + | High Resolution | Datasheet | |
| 1000 HARP 0.1 | + | High Resolution | 950 PMMA A2 | Datasheet |