RENA Compass Dual Stack Spin Rinse Dryer
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| Tool Name | RENA Compass Dual Stack Spin Rinse Dryer |
|---|---|
| Instrument Type | Wet Processing |
| Staff Manager | Kyle Keenan |
| Lab Location | Bay 3 |
| Tool Manufacturer | RENA |
| Tool Model | Compass |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
RENA Compass Spin Rinse Dryers (SRD) provide automated cleaning, rinsing, and drying of cassettes of 4" or 6" wafers after wet processing.
Applications
- Automatic SRD