Difference between revisions of "IPG IX-255 Excimer Micromachining Laser"
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m (Changed protection level for "IPG IX-255 Excimer Micromachining Laser" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite))) |
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| Tool_Manufacturer = IPG | | Tool_Manufacturer = IPG | ||
| Tool_Model = IX-255 | | Tool_Model = IX-255 | ||
| + | | Tool_SN = 32826 | ||
| Iris_Designation = LMM-01 | | Iris_Designation = LMM-01 | ||
| Lab_Phone = 3-9639 | | Lab_Phone = 3-9639 | ||
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== Description == | == Description == | ||
The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS. | The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS. | ||
| + | |||
| + | ===== Specifications ===== | ||
| + | * Laser 193nm nm | ||
| + | * Pulse Energy up to 10 mJ | ||
| + | * X-Y Positional Accuracy: <3 μm | ||
| + | * Z-theta Accuracy: <10 μm, ±0.02° | ||
| + | * Fixed Optics | ||
| + | * Vision System Resolution 0.12 μm/ pixel | ||
| + | * DXF and CSV File Interface | ||
| + | |||
===== Applications ===== | ===== Applications ===== | ||
Revision as of 10:00, 25 August 2022
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| Tool Name | IPG IX-255 Excimer Micromachining Laser |
|---|---|
| Instrument Type | Back End |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | IPG |
| Tool Model | IX-255 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | SOP |
Description
The IPG IX-255 Excimer Laser is a highly flexible UV laser micromachining system for multi-purpose, R&D and production applications. The system combines a Class 1 workstation integrated with a proprietary UV (193nm) laser and beam shape selector (infinitely variable rectangular and discrete circular) to machine transparent samples such as plastic, glass, and PDMS.
Specifications
- Laser 193nm nm
- Pulse Energy up to 10 mJ
- X-Y Positional Accuracy: <3 μm
- Z-theta Accuracy: <10 μm, ±0.02°
- Fixed Optics
- Vision System Resolution 0.12 μm/ pixel
- DXF and CSV File Interface
Applications
- Laser machining of plastics, glass and PDMS.
Resources
SOPs & Troubleshooting
- SOP: SOP