Difference between revisions of "General Equipment Information"
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(Created page with "Tools using Process Chilled Water: ALD-02 CVD-01 CVD-02 CVD-04 DE-03 DE-04 DE-05 DE-08 MA-02 PVD-01 PVD-02 PVD-03 PVD-04 PVD-05 PVD-06") |
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| Line 1: | Line 1: | ||
| − | Tools using Process Chilled Water | + | ===== Tools using Process Chilled Water ===== |
| − | ALD-02 | + | *ALD-02 |
| − | CVD-01 | + | *CVD-01 |
| − | CVD-02 | + | *CVD-02 |
| − | CVD-04 | + | *CVD-04 |
| − | DE-03 | + | *DE-03 |
| − | DE-04 | + | *DE-04 |
| − | DE-05 | + | *DE-05 |
| − | DE-08 | + | *DE-08 |
| − | MA-02 | + | *MA-02 |
| − | PVD-01 | + | *PVD-01 |
| − | PVD-02 | + | *PVD-02 |
| − | PVD-03 | + | *PVD-03 |
| − | PVD-04 | + | *PVD-04 |
| − | PVD-05 | + | *PVD-05 |
| − | PVD-06 | + | *PVD-06 |
Latest revision as of 12:09, 13 January 2023
Tools using Process Chilled Water
- ALD-02
- CVD-01
- CVD-02
- CVD-04
- DE-03
- DE-04
- DE-05
- DE-08
- MA-02
- PVD-01
- PVD-02
- PVD-03
- PVD-04
- PVD-05
- PVD-06