ABM3000HR Mask Aligner
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| Tool Name | ABM 3000HR Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | ABM |
| Tool Model | 3000HR |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | SOP |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
- xxx
Resources
SOPs & Troubleshooting
- SOP: SOP
- Video for basic tool use (no audio, 5.52min):Basic Video
- Video (LayoutEditor - negative resist alignment marks): Video
- The potentiometer for the inspection microscope light source on the MA-03 is a bit touchy, so only adjust the intensity if needed. If you find that adjustments make the light turn off, press down lightly as you rotate back and forth until you get it working again.