Process Resources

General Process Documents

• KemLab Resist Presentation

Film Characterization

• Deposition and Etch Characterization of LPCVD SiNx thin films
• ALD deposition of SiO2 using BDEAS and Ozone precursors

Soft Lithography

• Course Material for the QNF Soft Lithography Workshop
• PDF Presentation for Biological Researchers
• PDF Presentation for ESE 536
• Training Videos

• Training Video - Spin Coating Thick Resist
• Training Video - Use of MA-03, ABM Mask Aligner
• Training Video - Negative Resist First Mask Alignment Mark
• Training Video - Developing SU8 Resist
• Training Video - Degassing PDMS