Difference between revisions of "ABM3000HR Mask Aligner"
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(ABM Mask Aligner) |
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| − | + | [[Category:Deposition]] | |
| + | |||
| + | {{EquipmentInfo | ||
| + | | name = ABM Mask Aligner | ||
| + | | Tool_Name = ABM 3000HR Mask Aligner | ||
| + | | image = [[Image:ALD-01.jpeg|300px]] | ||
| + | | imagecaption = | ||
| + | | Instrument_Type = Lithography | ||
| + | | Staff_Manager = Eric Johnston | ||
| + | | Lab_Location = Soft Lithography | ||
| + | | Tool_Manufacturer = ABM | ||
| + | | Tool_Model = 3000HR | ||
| + | | Iris_Designation = MA-01 | ||
| + | | Lab_Phone = 3-9639 | ||
| + | | SOP Link = [https://repository.upenn.edu/scn_sop/10/] | ||
| + | }} | ||
| + | |||
| + | == Description == | ||
| + | The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask. | ||
| + | |||
| + | ===== Applications ===== | ||
| + | * xxx | ||
| + | |||
| + | |||
| + | |||
| + | == Resources == | ||
| + | |||
| + | ===== SOPs & Troubleshooting ===== | ||
| + | * [https://repository.upenn.edu/scn_sop/6/ QNF SOP] | ||
Revision as of 13:32, 14 March 2022
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| Tool Name | ABM 3000HR Mask Aligner |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Eric Johnston |
| Lab Location | Soft Lithography |
| Tool Manufacturer | ABM |
| Tool Model | 3000HR |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 3-9639 |
| SOP Link | [1] |
Description
The ABM Mask Aligner is a manual and versatile mask aligner with top-side alignment and substrate capabilities from 100mm down to small pieces. Requires a 5" mask or 5" glass plate with film mask.
Applications
- xxx