Process Resources
From Quattrone Nanofabrication Facility
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Film Characterization
Deposition and Etch Characterization of LPCVD SiNx thin films
ALD deposition of SiO2 using BDEAS and Ozone precursors
Soft Lithography
Course Material for the QNF Soft Lithography Workshop
PDF Presentation for Biological Researchers
PDF Presentation for ESE 536
Training Videos
Training Video - Spin Coating Thick Resist
Training Video - Use of MA-03, ABM Mask Aligner
Training Video - Negative Resist First Mask Alignment Mark
Training Video - Developing SU8 Resist
Training Video - Degassing PDMS
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