MPT Corp. RTP-600S Rapid Thermal Annealer
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| Tool Name | MPT Corp. RTP-600S Rapid Thermal Annealer |
|---|---|
| Instrument Type | Back End |
| Staff Manager | David Barth |
| Lab Location | Bay 2 |
| Tool Manufacturer | MPT Corp. |
| Tool Model | RTP-600S |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The RTP-600S system is an advanced bench-top rapid thermal processing system with multi-gas capabilities. The system processes wafers up to 6″ in diameter. The integrated process control system features real-time graphics, recipe management, data acquisition and display and has a comprehensive diagnostic function.
The system is configured for ≤800°C processing with thermocouple and has the option to flow in nitrogen as a process gas.
Applications
- Rapid thermal annealing of thin-films.