KLA Tencor P7 2D profilometer
Revision as of 13:33, 2 May 2022 by Dsbarth (talk | contribs) (Changed protection level for "KLA Tencor P7 2D profilometer" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite)))
 |
|
| Tool Name | KLA Tencor P7 2D profilometer |
|---|---|
| Instrument Type | Metrology |
| Staff Manager | Sam Azadi |
| Lab Location | Bay 2 |
| Tool Manufacturer | KLA |
| Tool Model | P7 |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | XXXXX |
| SOP Link | SOP |
Description
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.
Applications
- Film step height measurements
- Photo resist thickness
- Etched trench depth
- Materials characterization for surface roughness and waviness