https://wiki.nano.upenn.edu/wiki/index.php?title=KLA_Tencor_P7_2D%263D/stress_profilometer&feed=atom&action=history
KLA Tencor P7 2D&3D/stress profilometer - Revision history
2024-03-29T12:26:52Z
Revision history for this page on the wiki
MediaWiki 1.35.13
https://wiki.nano.upenn.edu/wiki/index.php?title=KLA_Tencor_P7_2D%263D/stress_profilometer&diff=1301&oldid=prev
Coana: update tool owner, update to NEMO
2024-01-03T18:18:22Z
<p>update tool owner, update to NEMO</p>
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<td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 18:18, 3 January 2024</td>
</tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l7" >Line 7:</td>
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<tr><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| imagecaption = </div></td><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| imagecaption = </div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Instrument_Type = Metrology</div></td><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Instrument_Type = Metrology</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| Staff_Manager = <del class="diffchange diffchange-inline">Sam Azadi</del></div></td><td class='diff-marker'>+</td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| Staff_Manager = <ins class="diffchange diffchange-inline">[[David Barth | David Barth]]</ins></div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Lab_Location = Bay 2</div></td><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Lab_Location = Bay 2</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Tool_Manufacturer = KLA </div></td><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Tool_Manufacturer = KLA </div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Tool_Model = P7</div></td><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Tool_Model = P7</div></td></tr>
<tr><td class='diff-marker'>−</td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>| <del class="diffchange diffchange-inline">Iris_Designation </del>= MET-02</div></td><td class='diff-marker'>+</td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>| <ins class="diffchange diffchange-inline">NEMO_Designation </ins>= MET-02</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Lab_Phone = XXXXX</div></td><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| Lab_Phone = XXXXX</div></td></tr>
<tr><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| SOP Link = [https://repository.upenn.edu/scn_sop/13/ SOP]</div></td><td class='diff-marker'> </td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>| SOP Link = [https://repository.upenn.edu/scn_sop/13/ SOP]</div></td></tr>
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Coana
https://wiki.nano.upenn.edu/wiki/index.php?title=KLA_Tencor_P7_2D%263D/stress_profilometer&diff=464&oldid=prev
Dsbarth: Changed protection level for "KLA Tencor P7 2D&3D/stress profilometer" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite))
2022-05-02T17:33:37Z
<p>Changed protection level for "<a href="/wiki/index.php?title=KLA_Tencor_P7_2D%263D/stress_profilometer" title="KLA Tencor P7 2D&3D/stress profilometer">KLA Tencor P7 2D&3D/stress profilometer</a>" ([Edit=Allow only autoconfirmed users] (indefinite) [Move=Allow only autoconfirmed users] (indefinite))</p>
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<td colspan="1" style="background-color: #fff; color: #202122; text-align: center;">← Older revision</td>
<td colspan="1" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 17:33, 2 May 2022</td>
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Dsbarth
https://wiki.nano.upenn.edu/wiki/index.php?title=KLA_Tencor_P7_2D%263D/stress_profilometer&diff=403&oldid=prev
Dsbarth: Protected "KLA Tencor P7 2D&3D/stress profilometer" ([Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite)) [cascading]
2022-04-29T18:31:57Z
<p>Protected "<a href="/wiki/index.php?title=KLA_Tencor_P7_2D%263D/stress_profilometer" title="KLA Tencor P7 2D&3D/stress profilometer">KLA Tencor P7 2D&3D/stress profilometer</a>" ([Edit=Allow only administrators] (indefinite) [Move=Allow only administrators] (indefinite)) [cascading]</p>
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<td colspan="1" style="background-color: #fff; color: #202122; text-align: center;">Revision as of 18:31, 29 April 2022</td>
</tr><tr><td colspan="2" class="diff-notice" lang="en"><div class="mw-diff-empty">(No difference)</div>
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Dsbarth
https://wiki.nano.upenn.edu/wiki/index.php?title=KLA_Tencor_P7_2D%263D/stress_profilometer&diff=270&oldid=prev
Trevinoj: Created page with "Category:Metrology {{EquipmentInfo | name = KLA Tencor P7 2D&3D/stress profilometer | Tool_Name = KLA Tencor P7 2D&3D/stress profilometer | image = Image:MET-02.jpeg|30..."
2022-03-29T20:44:07Z
<p>Created page with "<a href="/wiki/index.php?title=Category:Metrology&action=edit&redlink=1" class="new" title="Category:Metrology (page does not exist)">Category:Metrology</a> {{EquipmentInfo | name = KLA Tencor P7 2D&3D/stress profilometer | Tool_Name = KLA Tencor P7 2D&3D/stress profilometer | image = Image:MET-02.jpeg|30..."</p>
<p><b>New page</b></p><div>[[Category:Metrology]]<br />
<br />
{{EquipmentInfo<br />
| name = KLA Tencor P7 2D&3D/stress profilometer<br />
| Tool_Name = KLA Tencor P7 2D&3D/stress profilometer<br />
| image = [[Image:MET-02.jpeg|300px]]<br />
| imagecaption = <br />
| Instrument_Type = Metrology<br />
| Staff_Manager = Sam Azadi<br />
| Lab_Location = Bay 2<br />
| Tool_Manufacturer = KLA <br />
| Tool_Model = P7<br />
| Iris_Designation = MET-02<br />
| Lab_Phone = XXXXX<br />
| SOP Link = [https://repository.upenn.edu/scn_sop/13/ SOP]<br />
}}<br />
<br />
== Description ==<br />
The KLA-Tencor P7 Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces. The KLA-Tencor Profiler systems use stylus-based scanning to achieve high resolution.<br />
<br />
===== Applications =====<br />
* Film step height measurements<br />
* Photo resist thickness<br />
* Etched trench depth<br />
* Materials characterization for surface roughness and waviness<br />
* Wafer bow / stress measurements<br />
<br />
<br />
== Resources ==<br />
<br />
===== SOPs & Troubleshooting =====<br />
* [https://repository.upenn.edu/scn_sop/13/ QNF SOP]</div>
Trevinoj