Jupiter II RIE Plasma Etcher
Jump to navigation
Jump to search
 |
|
| Tool Name | Jupiter II RIE Plasma Etcher |
|---|---|
| Instrument Type | Etch |
| Staff Manager | Sam Azadi |
| Lab Location | Bay 2 |
| Tool Manufacturer | March |
| Tool Model | Jupiter II |
| NEMO Designation | {{{NEMO_Designation}}} |
| Lab Phone | 215-898-9748 |
| SOP Link | SOP |
Description
The March Jupiter II is a reactive ion etcher configured with O2 gas. The system is typically used as a plasma asher/cleaner.
Applications
- Removal of photoresist
- Removal of organic materials