DMO MicroWriter ML3 Pro
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| Tool Name | DMO MicroWriter ML3 Pro |
|---|---|
| Instrument Type | Lithography |
| Staff Manager | Dan Sabrsula |
| Lab Location | Bay 5 |
| Tool Manufacturer | Durham Magneto Optics |
| Tool Model | MicroWriter ML3 Pro |
| NEMO Designation | LW-03 |
| Nearest Phone | |
| SOP Link | SOP |
Description
The ML3 Pro is a flexible direct-write lithography tool with two laser sources at 405 nm and 365 nm and a minimum feature size of 400 nm.
Resources
SOPs & Troubleshooting
Link: SOP