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Combined display of all available logs of Quattrone Nanofabrication Facility. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 50 | older 50) (20 | 50 | 100 | 250 | 500)- 08:30, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CHF3 + O2 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 08:05, 18 June 2024 Azadi talk contribs created page PECVD SiO2 via CF4 (Created page with "== Goal == The purpose of this document is to examine the etch properties of the Oxford 80 Plus RIE system and to find the etch rate of SiO2 and S1818 MicroChem positive resi...")
- 15:02, 17 June 2024 Coana talk contribs deleted page PECVD SiO2 via CF4 (Author request: content was: " PECVD SiO<sub>2</sub> via CF<sub>4</sub>", and the only contributor was "Coana" (talk))
- 14:58, 17 June 2024 Coana talk contribs created page PECVD SiO2 via CF4 (Created page with " PECVD SiO<sub>2</sub> via CF<sub>4</sub>")
- 14:47, 17 June 2024 Coana talk contribs created page How to Make a Mask (Created page with "https://nemo.nano.upenn.edu/media/tool_documents/lw-01-heidelberg-dwl66/How_to_Make_a_Mask_At_QNF_v05.pdf")
- 15:41, 7 June 2024 Lucasamb talk contribs moved page ALD-02: Titanium Oxide Deposition to ALD-02: Titanium Dioxide Deposition
- 09:59, 7 June 2024 Lucasamb talk contribs created page ALD-02: Titanium Oxide Deposition (Created blank page)
- 09:56, 7 June 2024 Lucasamb talk contribs created page ALD-01: Titanium Oxide Deposition (Created page with "<iframe height="300px" width=2000px" key="google" level="docs" path=https:https://docs.google.com/spreadsheets/d/e/2PACX-1vRT0Xcfp3506lnri7h04_tPNBdXSckz1XCJizwMky8hWDH0QwxxVH...")
- 10:06, 6 June 2024 User account Yijied talk contribs was created automatically
- 15:28, 5 June 2024 User account Yubwang talk contribs was created automatically
- 13:51, 3 June 2024 Lucasamb talk contribs created page ALD-01: Hafnium Oxide Deposition (Created page with "<iframe height="500px" width="1000px"key="google" level="docs" path=https://docs.google.com/spreadsheets/d/e/2PACX-1vS0-QBsrmBWXosfTpJrMo44JuxVGfhODnOQRWZVMIgrOLrkO_LO5Hgd6DvL...")
- 10:00, 22 May 2024 Azadi talk contribs created page File:DE06 SOP v03.pdf
- 10:00, 22 May 2024 Azadi talk contribs uploaded File:DE06 SOP v03.pdf
- 13:42, 20 May 2024 Dsabr talk contribs created page File:Oxford PECVD SiO2 deposition.pdf
- 13:42, 20 May 2024 Dsabr talk contribs uploaded File:Oxford PECVD SiO2 deposition.pdf
- 13:26, 20 May 2024 Lucasamb talk contribs created page ALD-01: Aluminum Oxide Deposition (Created page with "<iframe height="500px" key="google" level="docs" path="https://docs.google.com/spreadsheets/d/e/2PACX-1vRT0Xcfp3506lnri7h04_tPNBdXSckz1XCJizwMky8hWDH0QwxxVHefXI4scbtD66peP2nHN...")
- 11:43, 20 May 2024 Bohnn talk contribs created page ToF-SIMS (Created page with "==Overview== '''Time of Flight Secondary Ion Mass Spectroscopy''' or '''ToF-SIMS''' is an technique performed in a FIB to analyze the composi...")
- 11:00, 20 May 2024 Dsabr talk contribs created page SiO2 (silicon dioxide) (Created page with "Silicon dioxide is an insulating, transparent oxide that is highly unreactive. It is often used as a passivation layer to protect electrical components. ==Equipment== ===...")
- 09:50, 16 May 2024 Dsabr talk contribs created page File:PVD 05 SOP.pdf
- 09:50, 16 May 2024 Dsabr talk contribs uploaded File:PVD 05 SOP.pdf
- 09:45, 16 May 2024 Dsabr talk contribs created page File:PVD 04 SOP.pdf
- 09:45, 16 May 2024 Dsabr talk contribs uploaded File:PVD 04 SOP.pdf
- 13:24, 15 May 2024 Dsbarth talk contribs created page ZEP Process Data (Created page with "<iframe height="400px" key="google" level="docs" path="/spreadsheets/u/0/d/e/2PACX-1vSvZG1_8z70Dl9liA3fY2p8jojsyW4ELRhjOzFc7UKzOlXOxWQ4XkD6m_RAMx8-u2E5G21yPdKG6loM/pubchart?oi...")
- 13:16, 15 May 2024 Dsbarth talk contribs changed group membership for Lucasamb from Editor to Editor and administrator
- 13:16, 15 May 2024 Dsbarth talk contribs changed group membership for Coana from Editor to Editor and administrator
- 13:16, 15 May 2024 Dsbarth talk contribs changed group membership for Dsabr from Editor to Editor and administrator
- 13:15, 15 May 2024 Dsbarth talk contribs changed group membership for Azadi from Editor to Editor and administrator
- 10:34, 13 May 2024 User account Lixlei talk contribs was created automatically
- 12:40, 10 May 2024 Bohnn talk contribs created page Keyence Profilometer (Created page with "Category:Characterization {{EquipmentInfo | name = Keyence Profilometer | Tool_Name = Keyence | image = 300px | imagecaption = | Instrument_Type = P...")
- 12:37, 10 May 2024 Bohnn talk contribs created page File:Keyence.jpg (image of keyence profilometer)
- 12:37, 10 May 2024 Bohnn talk contribs uploaded File:Keyence.jpg (image of keyence profilometer)
- 12:37, 10 May 2024 Bohnn talk contribs created page File:20240510 133218.jpg (image of keyence profilometer)
- 12:37, 10 May 2024 Bohnn talk contribs uploaded File:20240510 133218.jpg (image of keyence profilometer)
- 09:03, 10 May 2024 Dsbarth talk contribs deleted page File:CharlesV.jpeg
- 09:01, 10 May 2024 Dsbarth talk contribs deleted page Charles Veith (content before blanking was: "__NOTOC__ {{StaffMemberInfobox |StaffName = Charles Veith |StaffPhoto = CharlesV.jpeg |JobTitle = Purchasing Manager <br> Vender Relations (NNCI) |AreasResponsibility = Purchasing <br> Micro Contamination |PennID = cveith |Phone = 508-579-5487 (office) |OfficeLocation = 110 Singh }} == About == ===== Role in the QNF ===== Charles R. Veith is a Member of Technical Staff in the Quattrone Nanofabrication Facility. His main responsibilities are owner and manager of...")
- 13:11, 9 May 2024 Dsabr talk contribs created page Au (gold) (Created page with "==Equipment== ===Deposition Equipment=== * '''PVD-02:''' Lesker PVD75 E-Beam/Thermal Evaporator * '''PVD-03:''' Lesker PVD75...")
- 10:56, 9 May 2024 Dsabr talk contribs created page Ti (titanium) (Created page with "Titanium is a transition metal with atomic number 22 and symbol Ti. Titanium has a low density, high strength and is resistant to corrosion by water. It has relatively poor el...")
- 09:09, 9 May 2024 Dsabr talk contribs created page File:PVD03 SOP v02.pdf
- 09:09, 9 May 2024 Dsabr talk contribs uploaded File:PVD03 SOP v02.pdf
- 12:17, 7 May 2024 Dsbarth talk contribs created page File:EBPG5200+ SOP.pdf (SOP for EBL-03)
- 12:17, 7 May 2024 Dsbarth talk contribs uploaded File:EBPG5200+ SOP.pdf (SOP for EBL-03)
- 16:01, 25 April 2024 Dsabr talk contribs created page Micromanipulator 4060 Probe Station (Created page with "Category:Electrical Characterization {{EquipmentInfo | name = Micromanipulator 4060 Probe Station | Tool_Name = Micromanipulator 4060 Probe Station | image = Image:MET-...")
- 15:43, 25 April 2024 Dsabr talk contribs created page Dan Sabrsula (Created page with "__NOTOC__ {{StaffMemberInfobox |StaffName = Dan Sabrsula |StaffPhoto = Sabrsula.jpg |JobTitle = Nanofabrication Process Engineer |AreasResponsibility = PVD, Electrical Charact...")
- 12:09, 10 April 2024 User account Ericoc talk contribs was created automatically
- 10:31, 5 April 2024 Lucasamb talk contribs created page What is Chemical Vapor Deposition (CVD)? (Created page with "Chemical Vapor Deposition (CVD) in which thin films are deposited onto a substrate surface through the chemical reaction of vapor-phase precursor molecules. The basic process...")
- 10:03, 5 April 2024 Lucasamb talk contribs created page What is Atomic Layer Deposition? (Created page with "'''Atomic Layer Deposition (ALD)''' is a thin-film deposition technique used in the fabrication of semiconductor devices, microelectronics, and various nanotechnology applicat...")
- 09:27, 5 April 2024 Lucasamb talk contribs created page What is ALD? (Created page with "Here it is")
- 10:13, 4 April 2024 Dsabr talk contribs created page How PVD works (Created page with "this is how")
- 12:33, 1 April 2024 User account Mapenn talk contribs was created automatically
- 11:18, 1 April 2024 Coana talk contribs created page File:LW-01 S1818Lines 5um Feb2024.png (65mW, 70% intensity, + 20 focus)
